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发明名称
APPARATUS AND METHOD FOR EUTECTICALLY BONDING OF BARE CHIP
摘要
申请公布号
JPH0320050(A)
申请公布日期
1991.01.29
申请号
JP19890155287
申请日期
1989.06.16
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
IMAMURA TETSUKAZU
分类号
H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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