发明名称 Rotary wafer drier
摘要 A rotary wafer drying apparatus comprises a rotatable rotor for applying centrifugal force to the wafers, and a motor for rotating the rotor. A pair of cradles, attached to the rotor, receive a plurality of wafers arranged vertically. When the wafers are to be dried, the cradles are rotated by about 90 DEG from the state of reception, with the wafers maintained approximately at the horizontal state. When wafers of different diameters are to be dried and the size of the cradles should be changed correspondingly, not the rotor itself but only the pair of cradles in the rotor are changed.
申请公布号 US4987687(A) 申请公布日期 1991.01.29
申请号 US19890413331 申请日期 1989.09.27
申请人 DAINIPPON SCREEN MFG. CO., LTD. 发明人 SUGIMOTO, KENJI
分类号 H01L21/304;F26B5/08;H01L21/00 主分类号 H01L21/304
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