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发明名称
INTEGRATED CIRCUIT ELEMENT INSPECTION DEVICE
摘要
申请公布号
JPH0318778(A)
申请公布日期
1991.01.28
申请号
JP19890153434
申请日期
1989.06.15
申请人
MATSUSHITA ELECTRON CORP
发明人
USUI SHUNICHI;SOGO YOSHITAKA
分类号
G01R31/316;G01R31/28
主分类号
G01R31/316
代理机构
代理人
主权项
地址
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