| 摘要 |
PURPOSE:To compactly form a chuck main unit by forming a plurality of cylinders, which extend in a vertical direction, in the inside of the chuck main unit, having a chuck surface in the lower surface, and building a permanent magnet in a piston which is arranged movably in a vertical direction respectively in each cylinder. CONSTITUTION:Compressed air is introduced from the first port 31. In this way, the compressed air is introduced to an upper part of each cylinder 25, thus each piston 27 is lowered to hit the bottom surface of the cylinder 25. At this time, air, which exists in a lower part of each cylinder 25, is discharged through a connection passage 35, end part passage 34 and the second port 32. ln accordance with lowering action of this piston 27, a permanent magnet therein is brought in a condition that it approaches a chuck surface 26, thus magnetic force not less than a predetermined value is applied to the chuck surface 26. Accordingly, a jig 37, which holds an electronic part chip 36, is attracted to this chuck surface 26. |
