,申请号JP19890068585U-传众专利搜索

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发明名称
摘要
申请公布号	JPH038429(U)	申请公布日期	1991.01.28
申请号	JP19890068585U	申请日期	1989.06.14
申请人		发明人
分类号	C23F4/00;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/302	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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