Individual current regulating device for a tip in a field-effect microcathode planar array, and method of production

摘要

The device for regulating the individual current of a tip 6 of a field-effect microcathode planar array includes essentially a pedestal cut out from a resistive layer 5 placed in series with each tip. This pedestal is cut out by micro-machining the intrinsic silicon layer 2 supporting the tips, around each tip. <IMAGE>