| 摘要 |
PURPOSE:To increase the length and diameter of a laser medium by providing pairs of plural electrodes in a discharge space and generating a plurally divided pulse discharge to make uniform the temp. distribution of a buffer gas in the radial direction in the space. CONSTITUTION:The material vapor generator is formed by a vessel 2 having a discharge space 3 filled with a gas, the electrode pairs 13 and 14 opposed to each other in the axial direction (a) in the space 3. The electrode pairs 13 and 14 are arranged at intervals in the radial direction (b) of the space 3 and formed with the electrodes 13a-13c and 14a-14c. An electric discharge is generated in the space 3 to form metal vapor 5. Furthermore, a pulse phase controller for impressing the pulse voltages with the phase successively shifted on the electrodes 13a-13c and 14a-14c is provided. |
