发明名称 MATERIAL VAPOR GENERATOR
摘要 PURPOSE:To prevent the generation of an electric discharge through a heat reflecting plate and to prevent the decrease in the dielectric strength and breakage of the plate by providing a heat insulating layer in which the plate of specified structure is embedded and a vacuum closed pipe around a discharge tube in a metal vapor laser device, etc. CONSTITUTION:A buffer gas is supplied into the discharge tube 2 in the metal vapor laser device, and the buffer gas is heated by a pulse discharge generated in the internal discharge space 3 to evaporate the metal such as Cu and Au in the tube 2 and laser beam is generated. In this case, the specular heat reflecting plate 13 of metallic foil, etc., is spirally arranged in the heat insulating layer around the tube 2 at regular intervals in the (a) direction to reflect the discharge heat radiated in the radial direction (b) of the closed pipe 11 around the heat insulating layer toward the tube 2, and the heat loss by radiation is reduced. Meanwhile, when a current flows through the plate 13, an electric inductance is formed in the plate 13, hence the current is controlled, the generation of a discharge between the plate 13 and the pipe 11 and between the plasma in the discharge tube 2 and the plate 13 is prevented, and the breakage of the pipe 11 is obviated.
申请公布号 JPH0317258(A) 申请公布日期 1991.01.25
申请号 JP19890151925 申请日期 1989.06.14
申请人 MITSUBISHI ELECTRIC CORP 发明人 HARA KAZUHIKO;TABATA YOICHIRO;EGURI SHIGEO;UEDA YOSHIHIRO
分类号 C23C14/24;H01L21/203;H01S3/03;H01S3/036 主分类号 C23C14/24
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