OPTICAL APPARATUS FOR EVALUATING THIN FILM,申请号JP19890151781-传众专利搜索

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发明名称	OPTICAL APPARATUS FOR EVALUATING THIN FILM
摘要
申请公布号	JPH0317535(A)	申请公布日期	1991.01.25
申请号	JP19890151781	申请日期	1989.06.14
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	KAWAMURA TATSURO;TAKAO MASATOSHI
分类号	G01N21/27	主分类号	G01N21/27
代理机构		代理人
主权项
地址

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