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发明名称
MAGNETRON SPUTTERING DEVICE
摘要
申请公布号
JPH0317265(A)
申请公布日期
1991.01.25
申请号
JP19890150571
申请日期
1989.06.15
申请人
MITSUBISHI ELECTRIC CORP
发明人
FUKUICHI TOMOHIRO
分类号
C23C14/35;H01L21/203
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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