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发明名称
ELECTROSTATIC BREAKDOWN TEST EQUIPMENT FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0315773(A)
申请公布日期
1991.01.24
申请号
JP19900155227
申请日期
1990.06.15
申请人
HITACHI LTD;HITACHI MICRO COMPUT ENG LTD
发明人
ISAKA MINORU;ANDO KENJI
分类号
G01R31/26;G01R31/30
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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