发明名称 CRYSTAL GROWTH DEVICE AND CRYSTAL GROWTH
摘要 PURPOSE:To control atom one by one in a three-dimensional way by setting a needle having a tip whose size is about that of one atom in a molecular beam epitaxial growth device, transferring the needle while impressing voltage between the needle and a substrate and selectively dissociating a desired element only in a given zone. CONSTITUTION:A needle 9 having a tip whose size is about that of atom is set in a vacuum bath 1 of molecular beam epitaxial growth device. Further, mechanism of bringing the tip of the needle 9 close to the surface of a substrate to grow crystal and scanning the needle and mechanism capable of impressing voltage between the needle 9 and the surface of the substrate 3 and measuring tunnel current of the needle 9 are equipped. Constituent elements are fed from molecular beam sources 2 to the substrate 3 by molecular beams 4, about one atom layer or plural atom layers are adsorbed on the substrate, the tip of the needle 9 is brought close to the substrate 3 up to distance about size of atom, the needle is transferred while impressing voltage and a desired element is selectively dissociated only in a given zone.
申请公布号 JPH0316992(A) 申请公布日期 1991.01.24
申请号 JP19890153365 申请日期 1989.06.15
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KUBO MINORU
分类号 C30B23/08;C30B23/02;G01N37/00;G01Q60/10;G01Q80/00;G11B9/00;G11B9/14;H01L21/203;H01L29/06 主分类号 C30B23/08
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