| 摘要 |
The present invention provides a corrosion-resistant and heat-resistant aluminum-based alloy thin film consisting of a composite having a composition represented by the general formula, AlaNibXcNd, wherein: X is a metal element selected from Y and Zr and a, b, c and d are as follows, in atomic percentages: 70 </= a </= 93, 0.5 </= b </= 7.5, 0.5 </= c </= 12 and 1 </= d </= 18, the composite being at least 50% (by volume) composed of an amorphous phase. The thin films are produced by depositing a material having the composition represented by the above-defined general formula onto a substrate by a thin film formation technique, such as sputtering, vacuum deposition or ion plating. In the production process, only nitrogen may be supplied as gas. The novel aluminum-based alloy thin film has superior corrosion-resistance and heat-resistance together with high levels of hardness and wear resistance. Further, the thin films can be subjected to a high degree of bending. |
