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发明名称
VERFAHREN ZUR SELBSTAUSRICHTENDEN HERSTELLUNG VON INTEGRIERTEN DIGITALSCHALTUNGEN AUS GAAS.
摘要
申请公布号
DE3676160(D1)
申请公布日期
1991.01.24
申请号
DE19863676160
申请日期
1986.10.15
申请人
ITT INDUSTRIES, INC., NEW YORK, N.Y., US
发明人
SADLER, ROBERT ALLEN, ROANOKE VIRGINIA 24012, US;GEISSBERGER, ARTHUR EUGENE, ROANOKE VIRGINIA 24014, US
分类号
H01L29/872;H01L21/265;H01L21/285;H01L21/306;H01L21/338;H01L21/768;H01L21/8252;H01L29/47;H01L29/812;(IPC1-7):H01L21/265;H01L21/28;H01L29/76
主分类号
H01L29/872
代理机构
代理人
主权项
地址
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