| 摘要 |
<p>PURPOSE:To suppress the generation of the static electricity in a clean room and to obviate the generation of dust from needle-like electrodes by providing a fine particle depositing device having the needle like electrodes onto an air supplying path to a filter for capturing fine particles and installing the supply port of the air supplying path near the needle-like electrodes of an ion generator. CONSTITUTION:The gas in the clean room 1 is fed from an air suction port 14 of the air supplying path 13 into the ion generator 10 having the needle-like electrodes 16 as the fine particle depositing device to deposit the superfine particles in the gas on the fine particles. The gas deposited with the fine particles is sent to a membrane filter 9, by which the fine particles in the gas are captured. Finally, the gas from which the fine particles are captured is supplied from the supply port 15 near to the needle like electrodes 8 of the ion generator 7. The air of the extremely high cleanliness in which the superfine particles do not exist is supplied near the needle-like electrodes 8 of the ion generator 7. The deposition of the fine particles on the needle-like electrodes 8 is obviated even if the ion generator 7 operates.</p> |
