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发明名称
SEMICONDUCTOR WAFER AND MANUFACTURE THEREOF AND METHOD OF SELECTION OF SEMICONDUCTOR CHIP
摘要
申请公布号
JPH0316111(A)
申请公布日期
1991.01.24
申请号
JP19900035431
申请日期
1990.02.15
申请人
NEC CORP
发明人
KUSAMA NOBORU
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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