SURFACE CLEANING METHOD FOR MEASURING PROBE FOR PLASMA PARAMETER,申请号JP19890149221-传众专利搜索

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发明名称	SURFACE CLEANING METHOD FOR MEASURING PROBE FOR PLASMA PARAMETER
摘要
申请公布号	JPH0315197(A)	申请公布日期	1991.01.23
申请号	JP19890149221	申请日期	1989.06.12
申请人	NIPPON KOSHUHA KK;SAKAMOTO YUICHI	发明人	SAKAMOTO YUICHI
分类号	H05H1/00	主分类号	H05H1/00
代理机构		代理人
主权项
地址

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