| 发明名称 |
Electron microscope. |
| 摘要 |
<p>A sample (3) is irradiated with an electron beam (1) and analyzed by detecting characteristic X-rays obtained from the sample and electron beams transmitted thereby. There is provided means (14), which collects analysis results obtained by this analysis to compare the analysis results thus collected.</p> |
| 申请公布号 |
EP0409209(A2) |
申请公布日期 |
1991.01.23 |
| 申请号 |
EP19900113786 |
申请日期 |
1990.07.18 |
| 申请人 |
HITACHI, LTD. |
发明人 |
ISAKOZAWA, SHIGETO;KOBAYASHI, HIROYUKI |
| 分类号 |
G01N23/00;G01N23/22;G01N23/225;H01J37/252;H01J37/26 |
主分类号 |
G01N23/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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