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经营范围
发明名称
TITANIUM SILICIDE WIRING STRUCTURE
摘要
申请公布号
JPH0314234(A)
申请公布日期
1991.01.22
申请号
JP19890151069
申请日期
1989.06.13
申请人
MITSUBISHI ELECTRIC CORP
发明人
MAEDA ATSUSHI
分类号
H01L21/3205;H01L21/28;H01L21/283;H01L23/52;H01L29/43
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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