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发明名称
METHOD FOR ION IRRADIATION
摘要
申请公布号
JPH0313576(A)
申请公布日期
1991.01.22
申请号
JP19890148906
申请日期
1989.06.12
申请人
FUJITSU LTD
发明人
ISAKA HIDEKI
分类号
C23C14/48;H01J27/08;H01J37/08
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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