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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0312938(A)
申请公布日期
1991.01.21
申请号
JP19890146834
申请日期
1989.06.12
申请人
HITACHI LTD
发明人
MATSUYAMA HARUHIKO;SHOJI FUSAJI;HONDA ATSUSHI
分类号
H01L21/52;C09J179/08
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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