| 摘要 |
PURPOSE:To sample a black-and-white binary image or edge image corresponding to a distance by picking up an image of the interface between liquid and gas or two different kinds of liquid as a sliced plane of a binary distance image and utilizing a phenomenon of total reflection or a leak in the interface or the color and light emission characteristics of one liquid side. CONSTITUTION:Component 2a are mounted on a substrate 1a to be inspected. The substrate 1a is fixed with a seepage fixing jig 5a so that, for example, the lowest part to the interface between the liquid 3 and liquid 4 projects sufficiently from the interface. The liquid 4 is white transparent (or black opaque according to the color of the component) low-viscosity liquid which contains a fluorescent agent and has large specific gravity. Further, the liquid 3 is transparent high-viscosity liquid with low specific gravity and suppresses the waving of the interface. Then a camera 7a is put in focus on the interface to pick up its image and then the part which does not reach constant height is entirely white or black or luminescences because of the liquid 4. Consequently, the excellent binary image is obtained and corresponds to the binary distance image. |
