| 摘要 |
<p>PURPOSE:To remove ozone and silanes simultaneously and efficiently by using a removing agent comprised of soda lime and a cupric compound carried on the soda lime in removal of toxic components of ozone and silanes contained in a gas. CONSTITUTION:Soda lime is amorphous particle or granular condition and used preferably under water-retaining condition. As a cupric compound to be carried on the soda lime, cupric oxide, cupric hydroxide, basic cupric carbonate, etc., can be used and one or a mixture of more than one of them are used. The amount (as Cu) of the cupric compound to be carried on the soda lime is normally about 0.1-50% and preferably about 1-30%. The method to carry the compound can be selected either dry- or wet-method and in either case, sufficient effect as a removal agent is achieved. The removal agent is conventionally filled in a removal column and a gas containing toxic components such as ozone, silanes, etc., is led to the column and brought into contact with the removal agent so as to remove the toxic components. The temperature at the time of contacting the gas and the removal agent is normally <=100 deg.C.</p> |
