| 摘要 |
PURPOSE:To accurately measure the tunnel barrier distribution of the surface of a sample by providing a means which measures the surface shape of the sample by detecting a tunneling current, a means which excites a probe or the sample at right angles to the surface of the sample, and a means which measures tunnel barrier information by dividing the variation of the tunnel current by the tunneling current. CONSTITUTION:The probe 1 which is set nearby opposite the surface of the sample 2 is excited by DELTAS in a Z-axis direction by using a Z-axis piezoelectric element 3. Consequently, the tunneling current I and its variation quantity DELTAI are measured by a current detector 4 and an error detector 5 and a divider 6 obtains the value DELTAI/I. Its amplitude quantity is detected by a synchronous rectifying circuit or lock-in amplifier 7 and multiplied by a specific value to accurately obtain tunnel barrier (psi<1/2>) information. |
