| 摘要 |
PURPOSE:To stick pellicles to a mask in a short time without sticking foreign matters by providing two cassettes and holding a dummy mask between adhesives facing each other of pellicles stored in pellicle storage parts of these cassettes. CONSTITUTION:One pellicle 1 is stored in a pellicle storage part 3a of a cassette B3 with the adhesive turned up and is provided with hole type positioning parts 3b in four corners. This cassette B3 is provided with a stopper 3c, and a dummy mask 4 is positioned by the stopper 3c and is set. Another pellicle 1 is stored in a cassette A2 in the same manner as the cassete B3 and is provided with pin type positioning parts 2b in four corners. At the time of sticking pellicles 1 to the mask, the gap between two cassettes is slightly widened to pull out the dummy mask 4, and the mask is inserted instead till coming into contact with the stopper 3c, and two cassettes are pressed to each other, thereby sticking two pellicles to both faces of the mask in a moment. Thus, foreign matters are not stuck to the surface of the mask or the inside of pellicle when pellicles are stuck to the mask. |
