| 摘要 |
PURPOSE:To form a fine pattern having superior transparency in a visible region as well as high sensitivity to g line, superior shelf stability and satisfactory strength by incorporating a specified photosensitive diazo compd. as a sensitizer. CONSTITUTION:A photosensitive diazo compd. represented by fomula I is incorpo rated as a sensitizer. In the formula I, each of R1 and R2 is alkyl, aryl or aralkyl, R3 is H, methyl or phenyl, each of R4 -R7 is H, alkyl, aryl, aralkyl, alkoxy, halogen, hydroxyl or carboxyl, X<-> is an anion capable of forming a diazonium salt and (n) is an integer of 2-200. A fine pattern having superior transparency in a visible region as well as high sensitivity to g line of 436 nm wavelength, superior shelf stability and satisfactory strength can be formed. |
