| 摘要 |
PURPOSE:To detect the three-dimensional state of a material to be measured without contact and without destruction by taking out the image signal corresponding to X rays which penetrate the inspecting part of the material to be measured in the different directions. CONSTITUTION:A material to be measured 52 which is placed between an X-ray source 41 and a detecting means 42 for detecting the X rays is moved with a moving means 56 at a specified speed. The X rays are projected on the inspecting parts of the material to be measured 52 in the different directions. Only the image signals which are detected in the different directions for the inspecting parts are taking out with a taking-out means 74. The presence or absence of the defect at the inspecting part of the material to be measured 52 is judged with an inspecting means 76 from the maximum value of the image signals extracted from the same inspecting part. Therefore, even if soldered parts and the like are present at the parts other than the inspecting part, the X-ray penetration amount at the intended inspecting part can be obtained with out the effects of said soldered parts and the like. |
