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发明名称
APPARATUS FOR THE APPLICATION OF MATERIALS
摘要
申请公布号
AU605631(B2)
申请公布日期
1991.01.17
申请号
AU19880022702
申请日期
1988.09.21
申请人
LEYBOLD AKTIENGESELLSCHAFT
发明人
DR. RAINER LUDWIG;DR. ALFRED THELEN;GREGOR A. CAMPBELL;FRIEDRICH HASS;ROBERT W. CONN;DANIEL M. GOEBEL;ROLF ADAM;DR. HANS AICHERT;DR. HANS BETZ;DR. ANTON DIETRICH;DR. GONDE DITTMER;DR. KLAUS HARTIG;DR. MAX MAYR
分类号
C23C14/34;C23C14/00;C23C14/46;H01J37/34;(IPC1-7):C23C14/24
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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