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发明名称
摘要
申请公布号
JPH032948(B2)
申请公布日期
1991.01.17
申请号
JP19830132021
申请日期
1983.07.21
申请人
LEYBOLD AG
发明人
ARUBERUTO FUOIAASHUTAIN;KURAUSUUYURUGEN HAIMUBATSUHA;HERUMUUTO UARUSHAITO
分类号
C23C14/24;B01D1/00;C23C14/30;H01J37/305
主分类号
C23C14/24
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代理人
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