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发明名称
METHOD AND DEVICE FOR ION ASSISTED SPUTTERING
摘要
申请公布号
JPH0310071(A)
申请公布日期
1991.01.17
申请号
JP19890142095
申请日期
1989.06.06
申请人
UBE IND LTD
发明人
YAMAMOTO KIMISUMI;NAKAJIMA KOJI
分类号
C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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