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发明名称
BENDING TYPE DISPLACEMENT ELEMENT
摘要
申请公布号
JPH039519(A)
申请公布日期
1991.01.17
申请号
JP19890142978
申请日期
1989.06.07
申请人
TOSOH CORP
发明人
ASAKURA HIROSHI;YAMAMURA HIROSHI
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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