| 摘要 |
PURPOSE:To make easy the operation of a touch signal probe by making a stable mobile against a base stand, by providing a probe attaching and detaching mechanism to a Z axis construction body and further by providing a supporting plate and probe holder on the mobile table. CONSTITUTION:A table 50 is made mobile against a base stand 10 and a large- sized columns 90 of the base stand 10 are fixed. Also a beam 100 is provided to this columns 90 and a slider 110 is provided to this beam 100 and also a Z axis construction body 180 is supported by the slider 110. Further this construction body 180 has a probe attaching and detaching mechanism which can perform an automatic attaching and detaching of touch signal probe. On the other hand on the mobile table 50, a probe stocker 290 and a probe holder 250 which is placed on a flange part by the probe stocker 290 and to fix touch signal probes are provided. |
