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发明名称
METHOD FOR PREPARING DIAMOND
摘要
申请公布号
JPH038795(A)
申请公布日期
1991.01.16
申请号
JP19890143554
申请日期
1989.06.05
申请人
SEMICONDUCTOR ENERGY LAB CO LTD
发明人
SUMINO SHINYA;YAMAZAKI SHUNPEI
分类号
C30B29/04;C23C16/26
主分类号
C30B29/04
代理机构
代理人
主权项
地址
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