MOLECULAR BEAM EPITAXIAL DEVICE,申请号JP19890142961-传众专利搜索

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发明名称	MOLECULAR BEAM EPITAXIAL DEVICE
摘要
申请公布号	JPH038793(A)	申请公布日期	1991.01.16
申请号	JP19890142961	申请日期	1989.06.07
申请人	HITACHI LTD	发明人	KAWADA HIROKI;TAKAHASHI NUSHITO
分类号	C30B23/08;H01L21/203	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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