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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH038361(A)
申请公布日期
1991.01.16
申请号
JP19890144909
申请日期
1989.06.06
申请人
NEC CORP
发明人
OGAWA YOSHITO
分类号
H01L23/522;H01L21/768
主分类号
H01L23/522
代理机构
代理人
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