FORMING METHOD FOR DEPOSITED FILM PATTERN,申请号JP19890142136-传众专利搜索

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发明名称	FORMING METHOD FOR DEPOSITED FILM PATTERN
摘要
申请公布号	JPH038332(A)	申请公布日期	1991.01.16
申请号	JP19890142136	申请日期	1989.06.06
申请人	CANON INC	发明人	SUZUKI NOBUMASA
分类号	H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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