| 摘要 |
PURPOSE: To enable film formation or the like on a workpiece surface at a low cost by utilizing an energy beams with a small-sized apparatus by generating a non-contact vacuum seal in a prescribed region in proximity to the workpiece surface. CONSTITUTION: A vacuum body 42 having a surface 44 facing the workpiece 12 has a peripheral edge, a central region and plural grooves which are plural grooves 46a to 46d running in a circumferential direction not intersecting with each other and include the outermost side groove 46a adjacent to the peripheral edge described above and the innermost side grooves 46d adjacent to the central region described above. Differentially evacuating means 26, 28, 30 and 32, which communicate with the grooves via gas supply paths 50a to 50d, form the differential vacuum evacuation chambers for decreasing the amt. of the inflow of the particles in the atm. air into the central regions of these grooves by differentially evacuating the grooves is such a manner that the gaseous pressure of the innermost side grooves is eventually lower than the gaseous pressure in the outermost side grooves. Further, control gas means 24, 34 and 36 introduce the prescribed control gases into the prescribed grooves to further reduce the inflow of the particles in the atm. air into the central regions. |
