| 摘要 |
<p>A compact wafer carrier (16), for storing spaced semiconductor wafers (5) in parallel with each other, is provided for use in fabrication of semiconductor devices requiring high quality particulate contamination control. The wafer carrier (16) has an air cleaning device (8), including a secondary battery (13) as a power source, a motor fan (10), and a particulate air filter (12), and a storing chamber (7), directly connected to the air cleaning device (8), for storing the wafers. The storing chamber (7) has a first opening for receiving the filtered air flow from the air cleaning device (8), and a second opening for loading and unloading the wafers (5), both openings facing each other. As a result, the major part of the filtered air flows in a laminated stream passing along the surfaces of the stored wafers (5) with a fairly high speed, serving to protect the wafers (5) from the intrusion of the particles contained in the environmental air, and removing the particles originally adhered to the surfaces of the wafers (5).</p> |
