发明名称 Device for accepting and holding a workpiece in vacuum coating apparatus
摘要 A vacuum coating device having a workpiece carrier rotatably positioned within the process chamber including a device for positioning and releasably securing the workpiece on the carrier comprising a crank-lever mechanism positioned at a transfer station and a clamping mechanism positioned on the carrier. The crank lever mechanism operatively engages the clamping mechanism to release or secure a workpiece on the carrier.
申请公布号 US4984531(A) 申请公布日期 1991.01.15
申请号 US19890419706 申请日期 1989.10.11
申请人 LEYBOLD AKTIENGESELLSCHAFT 发明人 ZEJDA, JAROSLAV;SCHUHMACHER, MANFRED
分类号 C23C14/50;C23C14/56;H01L21/683 主分类号 C23C14/50
代理机构 代理人
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