发明名称 |
Device for accepting and holding a workpiece in vacuum coating apparatus |
摘要 |
A vacuum coating device having a workpiece carrier rotatably positioned within the process chamber including a device for positioning and releasably securing the workpiece on the carrier comprising a crank-lever mechanism positioned at a transfer station and a clamping mechanism positioned on the carrier. The crank lever mechanism operatively engages the clamping mechanism to release or secure a workpiece on the carrier.
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申请公布号 |
US4984531(A) |
申请公布日期 |
1991.01.15 |
申请号 |
US19890419706 |
申请日期 |
1989.10.11 |
申请人 |
LEYBOLD AKTIENGESELLSCHAFT |
发明人 |
ZEJDA, JAROSLAV;SCHUHMACHER, MANFRED |
分类号 |
C23C14/50;C23C14/56;H01L21/683 |
主分类号 |
C23C14/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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