发明名称 |
Force meter with optical waveguide integrated in a substrate |
摘要 |
An optical waveguide force meter for the measurement of forces or stresses integrated on a single substrate, including: a single-mode transducer waveguide supporting only the stresses which are applied through the intermediate portion of an upper plate of the force meter; a coupling/mixing grating having N focussing concave gratings provided adjacent an exit end of the optical waveguide; N detectors arranged at each of the N focussing points of waves defracted by the coupling/mixing grating; N TM polarization filters arranged respectively between each concave grating and each detector; and a single-mode laser source. The waveguide, coupling/mixing grating and polarization filters are all provided on the single substrate. The single-mode laser source and detectors are supported by the substrate and by an underlying base plate member.
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申请公布号 |
US4984863(A) |
申请公布日期 |
1991.01.15 |
申请号 |
US19890410520 |
申请日期 |
1989.09.21 |
申请人 |
CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA |
发明人 |
PARRIAUX, OLIVIER;NEUMAN, VICTOR;VOIRIN, GUY |
分类号 |
G01L1/24;G02B6/00;G02B6/12;G02F1/01 |
主分类号 |
G01L1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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