Method and an apparatus for aligning first and second objects with each other,申请号US19890453856-传众专利搜索

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发明名称	Method and an apparatus for aligning first and second objects with each other
摘要
申请公布号	US4984890(A)	申请公布日期	1991.01.15
申请号	US19890453856	申请日期	1989.12.20
申请人	KABUSHIKI KAISHA TOSHIBA;TOKYO KOGAKU KIKAI KABUSHIKI KAISHA	发明人	TOJO, TORU;KUWABARA, OSAMU;KAMIYA, MASASHI;YOSHINO, HISAKAZU
分类号	G01B11/00;G03F9/00;H01L21/027;H01L21/30;H01L21/68	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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