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发明名称
MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号
JPH036818(A)
申请公布日期
1991.01.14
申请号
JP19890141787
申请日期
1989.06.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
KIRIYAMA SHUJI
分类号
H01L21/302;H01L21/3065;H01L21/66
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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