| 摘要 |
PURPOSE:To obtain a Cr target material having a good vapor deposition characteristic at a high yield by packing specific metallic Cr powder having high purity to a capsule made of a steel, etc., and hermetically sealing the capsule then subjecting the powder to hot isotropic hydrostatic molding. CONSTITUTION:The high-purity Cr powder consisting of respectively <=0.05% C and N and the balance inevitable impurities, contg. >=90% 20 mesh grain size and the balance <=10 mesh and having >=99.5% purity is packed into the steel or stainless steel capsule. The powder is hermetically sealed under <=10<-3>mmHg vacuum, and is subjected to hot isotropic hydrostatic molding (HIP) for >=30min at >=1,000 deg.C under >=500kgf/cm<2> pressure. The powder is preferably subjected to hot working at about 700-1,200 deg.C and is further preferably subjected to warm working at about <=50% working rate at preferably about >=250 deg.C after the HIP. The molding is finally heated for about >=20min at about 600-1,100 deg.C in succession thereof and is subjected to an annealing treatment. |
