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发明名称
FINE ADJUSTMENT DEVICE
摘要
申请公布号
JPH036489(A)
申请公布日期
1991.01.11
申请号
JP19890140809
申请日期
1989.06.02
申请人
ASUTORO DESIGN KK
发明人
YAMADA YASUHIRO;SONE KAZUYOSHI
分类号
G01B5/00;G12B5/00;H01L21/66
主分类号
G01B5/00
代理机构
代理人
主权项
地址
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