| 摘要 |
PURPOSE:To prevent a false information and thereby to enable execution of accurate inspection by detecting characteristics on the shape and width of a wiring pattern with regard to both a reference board and a board for inspection and by judging from combination of the characteristics whether the characteristics have a defective pattern or not. CONSTITUTION:An (xy) table 12 whereon a sample board 11 is mounted moves in the direction (y) in synchronization with a line sync clock supplied from a terminal 21, and when scanning in the direction of the board 11 is ended, the table moves in the direction (x). After this movement, subsequently, scanning is made in the direction (y) again reversely to the previous one, so that the whole surface of the board 11 be scanned. A distance of movement at this time is determined on the basis of the image formation magnification of a lens 14 and the number of elements of a CCD line sensor 15. Next, the board 11 is illuminated by a lamp 13 and a reflected light is magnified and imaged on the sensor 15 by the lens 14. Then, an analog image signal 17 is inputted to an analog comparator 18 and binary-coded at a threshold value level supplied from a terminal 19. |
