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发明名称
VERFAHREN ZUR STEUERUNG EINES VERDAMPFUNGSPROZESSES
摘要
申请公布号
DE3921040(A1)
申请公布日期
1991.01.10
申请号
DE19893921040
申请日期
1989.06.27
申请人
BALZERS AG, BALZERS, LI
发明人
WEGMANN, URS, OBERSCHAN, CH;KOLLER, ALBERT, SARGANS, CH
分类号
C23C14/54;H01J37/302;H01J37/305
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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