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经营范围
发明名称
VAPOR GROWTH METHOD
摘要
申请公布号
JPH034517(A)
申请公布日期
1991.01.10
申请号
JP19890137461
申请日期
1989.06.01
申请人
TOSHIBA CORP
发明人
KUSHIBE MITSUHIRO;FUNAMIZU MASAHISA;EGUCHI KAZUHIRO;OBA YASUO
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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