DIELECTRIC, WHICH CAN BE FLATTENED

摘要

PURPOSE: To provide good flattening characteristics and insulation characteristics and enable structuring by constituting a dielectric by a base material of organic polymer having specific high-temperature stability. CONSTITUTION: A dielectric constituted by a base material of organic polymer of high-temperature stability where a solid filler capable of being etched in oxide plasma and having high thermal conductivity and good dielectric characteristics is embedded in a finely distributed state. The filler is up to 30vol.% in quantity and is advantageous in that the material is amorphous carbon containing hydrogen. Thereby, the dielectric has good flattening characteristics and insulation characteristics and low permittivity, low loss factor, and high thermal conductivity and can be also structured.