| 摘要 |
PURPOSE:To perform an oscillation in high efficiency by a strong ultraviolet ray corona preliminary ionization by employing high permittivity ceramics formed by a vapor method as a dielectric material. CONSTITUTION:High permittivity ceramics (SrTiO3) are formed on the whole surface of an auxiliary electrode 3 by means of a vapor method. SrTiO3 is deposited on the whole surface of the electrode 3 by sputtering with solid SrTiO3 as a sputtering target. A second main discharge electrode 2 is so provided as to bring it into contact with the surface of the dielectric material 4 made of SrTiO3. The SrTiO3 (330 of permittivity) has 100 times of permittivity as high as the dielectric material of quartz to perform a strong UV corona preliminary ionization, thereby achieving an oscillation in high efficiency. The high permittivity ceramics includes, for example, in addition to the SrTiO3, BaTiO3, and PbTiO3. |
