| 摘要 |
<p>PURPOSE:To form fine color patterns with good processing accuracy and to improve the yield of production by consisting of the color filter material of a solvent, electron beam resists dissolved in the solvent and dyes dissolved in the solvent. CONSTITUTION:The color filter material consists of the solvent, the electron beam resists 21, 31, 41 dissolved in this solvent and the dyes dissolved in the solvent. The color filter material consisting of the solvent, the electron beam resists 21, 31, 41 dissolved in this solvent and the dyes dissolved in the solvent is applied on a substrate 1 and is subjected to an electron beam drawing and developing to form the color patterns 2 to 4 of the dyed colors. The color filter having the color patterns of the high processing accuracy is produced in this way.</p> |
